Ziqiang John Mao

According to our database, Ziqiang John Mao authored at least 4 papers in 2004.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2004

Synthesis of an event based deadlock avoidance supervisor for semiconductor manufacturing systems with choices in process flows.

Wenle Zhang, Ziqiang John Mao

Proceedings of the 43rd IEEE Conference on Decision and Control, 2004

An adaptive model for the control of critical dimension in photolithography process.

Wei Kang, Ziqiang John Mao

Proceedings of the 43rd IEEE Conference on Decision and Control, 2004

Synthesis of an event based supervisor for deadlock avoidance in semiconductor manufacturing systems.

Wenle Zhang, Ziqiang John Mao

Proceedings of the 2004 American Control Conference, 2004

Adaptive modeling and H_∞ control for photolithography manufacturing process.

Wei Kang, Ziqiang John Mao

Proceedings of the 2004 American Control Conference, 2004