Yuxi Yu
Timeline
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Bibliography
2013
A Si-Glass based pressure sensor with a single piezoresistive element for harsh environment applications.
Proceedings of the 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2013
Fabrication of silicon piezoresistive pressure sensor using a reliable wet etching process.
Proceedings of the 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2013