Yuxi Sun
Affiliations:- Guangdong University of Technology, Guangzhou, China
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Bibliography
2011
Cycle time analysis for wafer revisiting process in scheduling of single-arm cluster tools.
Int. J. Autom. Comput., 2011
Closed-form solution for cycle time of revisiting processes in single-arm cluster tool scheduling with atomic layer deposition.
Proceedings of the IEEE International Conference on Networking, Sensing and Control, 2011