Yutaro Arai

According to our database, Yutaro Arai authored at least 1 paper in 2021.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2021

Flexible Fiber Conditioner for Fine Conditioning of Polishing Pad and its Evaluation in Chemical Mechanical Polishing: Verification of SUS-FFC on Soft Urethane Foam Pad and Proposal of PEEK-FFC.

Michio Uneda, Naoki Takahashi, Takashi Fujita, Yutaro Arai

Int. J. Autom. Technol., 2021