Yoshinori Takao
Orcid: 0000-0002-3468-8857
According to our database1,
Yoshinori Takao
authored at least 4 papers
between 2012 and 2014.
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Bibliography
2014
Random telegraph noise as a new measure of plasma-induced charging damage in MOSFETs.
Proceedings of the 2014 IEEE International Conference on IC Design & Technology, 2014
A new aspect of plasma-induced physical damage in three-dimensional scaled structures - Sidewall damage by stochastic straggling and sputtering.
Proceedings of the 2014 IEEE International Conference on IC Design & Technology, 2014
2013
Atomistic simulations of plasma process-induced Si substrate damage - Effects of substrate bias-power frequency.
Proceedings of 2013 International Conference on IC Design & Technology, 2013
2012
Optimization problems for plasma-induced damage - A concept for plasma-induced damage design.
Proceedings of the IEEE International Conference on IC Design & Technology, 2012