Yojiro Mano
According to our database1,
Yojiro Mano
authored at least 2 papers
in 1987.
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Bibliography
1987
Process Modeling for Photoresist Development and Design of DLR/sd (Double-Layer Resist by a Single Development) Process.
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1987
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1987