Yit Sung Ngo

According to our database, Yit Sung Ngo authored at least 2 papers in 2010.

Collaborative distances:

• Dijkstra number of four.
• Erdős number of four.

2010

Equipment Design and Control of Advanced Thermal-Processing Module in Lithography.

Arthur Tay, Hui Tong Chua, Yuheng Wang, Yit Sung Ngo

IEEE Trans. Ind. Electron., 2010

Equipment design and process control of critical dimensions in lithography.

Yit Sung Ngo, Geng Yang, Andi Sudjana Putra, Kar Tien Ang, Arthur Tay, Zhong Ping Fang

Proceedings of the 8th IEEE International Conference on Control and Automation, 2010