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Yang-Kuao Kuo

According to our database1, Yang-Kuao Kuo authored at least 3 papers between 2004 and 2006.

Collaborative distances:
  • Dijkstra number2 of six.
  • Erdős number3 of six.

Timeline

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Article 
PhD thesis 
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Links

On csauthors.net:

Bibliography

2006
Control ability of spin coating planarization of resist filmand optimal control of developers.
[BibTeX]
[DOI]
Yang-Kuao Kuo
,
Chuen-Guang Chao
Microelectron. J., 2006

2005
Analysis of the effects of reflectance and refraction generated by wafers made from fused silica, ALOxNy and TiSixNy under different light sources on pattern length and best focus.
[BibTeX]
[DOI]
Yang-Kuao Kuo
,
Chuen-Guang Chao
Microelectron. J., 2005

2004
Analysis of instability line width and white wall created by the photolithography process.
[BibTeX]
[DOI]
Yang-Kuao Kuo
,
Chuen-Guang Chao
,
Chi-Yuan Lin
Microelectron. J., 2004


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