Y. Mita

According to our database, Y. Mita authored at least 1 paper in 2005.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2005

Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures.

Frédéric Marty, Lionel Rousseau, Bassam Saadany, B. Mercier, Olivier Français, Y. Mita, Tarik Bourouina

Microelectron. J., 2005