Xinchun Lu
Orcid: 0000-0002-1630-7651
According to our database1,
Xinchun Lu
authored at least 3 papers
between 2013 and 2023.
Collaborative distances:
Collaborative distances:
Timeline
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2022
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Bibliography
2023
Metal Thickness Measurement System Based on a Double-Coil Eddy-Current Method With Characteristic Ratio Detection.
IEEE Trans. Ind. Electron., 2023
2022
Thickness Measurement Based on Eddy Current Sensor With Coaxial Double Coil for Chemical Mechanical Polishing.
IEEE Trans. Instrum. Meas., 2022
2013
Stress analysis of Cu/low-k interconnect structure during whole Cu-CMP process using finite element method.
Microelectron. Reliab., 2013