Wolfgang Pyka
According to our database1,
Wolfgang Pyka
authored at least 3 papers
between 1998 and 2003.
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Bibliography
2003
Simulation of arsenic in situ doping with polysilicon CVD and its application to high aspect ratio trenches.
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 2003
1999
Three-dimensional simulation of HPCVD-linking continuum transport and reaction kinetics with topography simulation.
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1999
1998
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1998