Wenze Yao

According to our database, Wenze Yao authored at least 2 papers in 2023.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of four.

2023

Fast and accurate proximity effect correction algorithm based on pattern edge shape adjustment for electron beam lithography.

Wenze Yao, Hongcheng Xu, Haojie Zhao, Ming Tao, Jie Liu

Microelectron. J., March, 2023

Efficient Proximity Effect Correction Using Fast Multipole Method With Unequally Spaced Grid for Electron Beam Lithography.

Wenze Yao, Haojie Zhao, Chengyang Hou, Wei Liu, Hongcheng Xu, Xin Zhang, Jing Xiao, Jie Liu

IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 2023