Wenqu Su
Timeline
2021
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Bibliography
2021
Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles.
Sensors, 2021
Modeling and Optimization of ScAlN-based MEMS Mirror with Large Static Two-axis Tilting Angle.
Proceedings of the 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2021