V. N. Bliznetsov
According to our database1,
V. N. Bliznetsov
authored at least 2 papers
between 2003 and 2005.
Collaborative distances:
Collaborative distances:
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Bibliography
2005
Process improvement of 0.13mum Cu/Low K (Black Diamond<sup>TM</sup>) dual damascene interconnection.
Microelectron. Reliab., 2005
2003
Study and improvement of electrical performance of 130 nm Cu/CVD low k SiOCH interconnect related to via etch process.
Microelectron. J., 2003