Toshihide Uematsu

According to our database, Toshihide Uematsu authored at least 2 papers between 2009 and 2010.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2010

Development of high accuracy wafer thinning and pickup technology for thin wafer.

Chuichi Miyazaki, Haruo Shimamoto, Toshihide Uematsu, Yoshiyuki Abe, Kosuke Kitaichi, Tadahiro Morifuji, Shoji Yasunaga

Proceedings of the IEEE International Conference on 3D System Integration, 2010

2009

Development of wafer thinning and dicing technology for thin wafer.

Chuichi Miyazaki, Haruo Shimamoto, Toshihide Uematsu, Yoshiyuki Abe

Proceedings of the IEEE International Conference on 3D System Integration, 2009