Tietun Sun
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Bibliography
2003
Study On Feature Of Silicon Microtrenches With A Multiplexed Inductively Coupled Plasma Etcher.
Int. J. Comput. Eng. Sci., 2003
Int. J. Comput. Eng. Sci., 2003
Fabrication Process Of A Capacitive Microphone With p++ Diaphragm And Silicon Bonded Top-Plate.
Int. J. Comput. Eng. Sci., 2003