Takuya Naoe
According to our database1,
Takuya Naoe
authored at least 6 papers
between 2012 and 2015.
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Bibliography
2015
Case study: Root cause of fluorine detection during TiN ARC layer corrosion of AlSiCu metal lines.
Microelectron. Reliab., 2015
Microelectron. Reliab., 2015
2014
Case studies of defect localization based on software-based fault diagnosis in comparison with PEMS/OBIRCH analysis.
Microelectron. Reliab., 2014
2013
Local damage free Si substrate ultra thinning for backside emission spectral analysis using OBPF for LSI failure mode detection.
Microelectron. Reliab., 2013
2012
Via high resistance failure analysis of LSI devices induced by multiple factors related to process and design.
Microelectron. Reliab., 2012
Decapsulation technique using electrochemical etching for failure analysis of WLCSP n-type Si assembled module devices.
Microelectron. Reliab., 2012