Tadashi Nakatani
According to our database1,
Tadashi Nakatani
authored at least 2 papers
between 2005 and 2011.
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Bibliography
2011
Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam.
Proceedings of the 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31, 2011
2005