Susanne Ohsiek

According to our database, Susanne Ohsiek authored at least 2 papers between 2013 and 2014.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2014

ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM.

D. H. Triyoso, Wenke Weinreich, Konrad Seidel, Mark G. Nolan, Patrick Polakowski, D. Utess, Susanne Ohsiek, K. Dittmar, M. Weisheit, M. Licbau, R. Fox

Proceedings of the 2014 IEEE International Conference on IC Design & Technology, 2014

2013

Impact of precursors choice on characteristics of PEALD SiN for spacer applications.

Dina H. Triyoso, Klaus Hempel, Susanne Ohsiek, Jeff Shu, Jamie K. Schaeffer, Markus Lenski

Proceedings of 2013 International Conference on IC Design & Technology, 2013