Sungil Yun

According to our database, Sungil Yun authored at least 5 papers between 2021 and 2023.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2023

Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation.

Matthew Tom, Henrik Wang, Feiyang Ou, Sungil Yun, Gerassimos Orkoulas, Panagiotis D. Christofides

Comput. Chem. Eng., October, 2023

2022

Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design.

Sungil Yun, Matthew Tom, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides

Comput. Chem. Eng., 2022

Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching.

Sungil Yun, Matthew Tom, Gerassimos Orkoulas, Panagiotis D. Christofides

Comput. Chem. Eng., 2022

Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor.

Matthew Tom, Sungil Yun, Henrik Wang, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides

Comput. Chem. Eng., 2022

2021

Integration of feedback control and run-to-run control for plasma enhanced atomic layer deposition of hafnium oxide thin films.

Sungil Yun, Yangyao Ding, Yichi Zhang, Panagiotis D. Christofides

Comput. Chem. Eng., 2021