Sohya Kudoh
According to our database1,
Sohya Kudoh
authored at least 6 papers
between 2015 and 2020.
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Bibliography
2020
<i>In-Situ</i> N<sub>2</sub>-Plasma Nitridation for High-k HfN Gate Insulator Formed by Electron Cyclotron Resonance Plasma Sputtering.
IEICE Trans. Electron., 2020
2019
Ultrathin HfN Multilayer Gate Insulator Formation with High Dielectric Constant Induced by Interface Polarization.
Proceedings of the Device Research Conference, 2019
2018
Improvement of Endurance Characteristics for Al-Gate Hf-Based MONOS Structures on Atomically Flat Si(100) Surface Realized by Annealing in Ar/H<sub>2</sub> Ambient.
IEICE Trans. Electron., 2018
Proceedings of the 76th Device Research Conference, 2018
2016
A Study on Substrate Orientation Dependence of Si Surface Flattening Process by Sacrificial Oxidation and Its Effect on MIS Diode Characteristics.
IEICE Trans. Electron., 2016
2015
A Study on Si(100) Surface Flattening Utilizing Sacrificial Oxidation Process and Its Effect on MIS Diode Characteristics.
IEICE Trans. Electron., 2015