Sigeaki Saito

According to our database, Sigeaki Saito authored at least 1 paper in 2011.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2011

Development of high accuracy wafer thinning and pickup technology for thin wafer.

Kosuke Kitaichi, Haruo Shimamoto, Chuichi Miyazaki, Yoshiyuki Abe, Sigeaki Saito, Shoji Yasunaga

Proceedings of the 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31, 2011