Si-Jun Kim
Orcid: 0000-0001-7782-7194
According to our database1,
Si-Jun Kim
authored at least 7 papers
between 2022 and 2023.
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Bibliography
2023
Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process.
Sensors, March, 2023
2022
Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath.
Sensors, 2022
Low-Temperature Plasma Diagnostics to Investigate the Process Window Shift in Plasma Etching of SiO2.
Sensors, 2022
Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation.
Sensors, 2022
Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics.
Sensors, 2022
Crossing Frequency Method Applicable to Intermediate Pressure Plasma Diagnostics Using the Cutoff Probe.
Sensors, 2022
Refined Appearance Potential Mass Spectrometry for High Precision Radical Density Quantification in Plasma.
Sensors, 2022