Shinichi Iida
According to our database1,
Shinichi Iida
authored at least 3 papers
between 2005 and 2021.
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Bibliography
2021
A Simplified Analytical Damping Constant Model for Perforated Proof Mass Structure of MEMS Capacitive Accelerometer by Multi-Layer Metal Technology.
Proceedings of the 2021 IEEE Sensors, Sydney, Australia, October 31 - Nov. 3, 2021, 2021
2019
Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability.
Proceedings of the 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019, 2019
2005
Proceedings of the Spatial Information Theory, International Conference, 2005