Seungwoo Cha

According to our database, Seungwoo Cha authored at least 1 paper in 2023.

Collaborative distances:

• Dijkstra number of four.
• Erdős number of four.

2023

High-Speed Wafer Temperature Control Approach of Step Chiller for Semiconductor Manufacturing Equipment.

Hyeonjun Yun, Hyeseon Kwon, Sangsu Yeh, Minsu Lee, Jonghwa Kim, Yunha Kim, Seungwoo Cha, Mingu Kang, Jooyeop Nam

Proceedings of the 49th Annual Conference of the IEEE Industrial Electronics Society, 2023