S. Kal
Timeline
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Bibliography
2006
CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity.
Microelectron. J., 2006
Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon.
Microelectron. J., 2006
Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface.
Microelectron. J., 2006
Analysis and prevention of convex corner undercutting in bulk micromachined silicon microstructures.
Microelectron. J., 2006