Robert Havey
According to our database1,
Robert Havey
authored at least 4 papers
between 2011 and 2014.
Collaborative distances:
Collaborative distances:
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Bibliography
2014
Proceedings of the 2014 Winter Simulation Conference, 2014
2013
Proceedings of the Winter Simulations Conference: Simulation Making Decisions in a Complex World, 2013
2012
Improving cluster tools performance using colored Petri nets in semiconductor manifacturing.
Proceedings of the Winter Simulation Conference, 2012
2011
Application of tool science techniques to improve tool efficiency for a dry etch cluster tool.
Proceedings of the Winter Simulation Conference 2011, 2011