Rami Khazaka
According to our database1,
Rami Khazaka
authored at least 3 papers
between 2022 and 2024.
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Bibliography
2024
First Demonstration of Superconducting Nb Contact on Heavily-Doped Group IV Semiconductor.
Proceedings of the IEEE Symposium on VLSI Technology and Circuits 2024, 2024
2023
Record High Active Boron Doping using Low Temperature In-situ CVD: Enabling Sub-5×10<sup>-10</sup> Ω-cm<sup>2</sup> ρc from Cryogenic (5 K) to Room Temperature.
Proceedings of the 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), 2023
2022
300 mm Wafer-scale In-situ CVD Growth Achieving 5.1×10<sup>-10</sup> Ω-cm<sup>2</sup> P-Type Contact Resistivity: Record 2.5×10<sup>21</sup> cm<sup>-3</sup> Active Doping and Demonstration on Highly-Scaled 3D Structures.
Proceedings of the IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), 2022