Peter J. Matsuo

According to our database, Peter J. Matsuo authored at least 1 paper in 1999.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

1999

Surface science issues in plasma etching.

Gottlieb S. Oehrlein, Marcus F. Doemling, Bernd E. E. Kastenmeier, Peter J. Matsuo, Neal R. Rueger, Marc Schaepkens, Theodorus E. F. M. Standaert

IBM J. Res. Dev., 1999