Patrick Polakowski

According to our database, Patrick Polakowski authored at least 4 papers between 2014 and 2016.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of four.

2016

La-doped ZrO2 based BEoL decoupling capacitors.

Wenke Weinreich, Konrad Seidel, Patrick Polakowski, Maximilian Drescher, A. Gummenscheimer, Mark G. Nolan, L. Cheng, D. H. Triyoso

Proceedings of the International Conference on IC Design and Technology, 2016

Impact of field cycling on HfO2 based non-volatile memory devices.

Uwe Schroeder, Milan Pesic, Tony Schenk, Halid Mulaosmanovic, Stefan Slesazeck, Johannes Ocker, Claudia Richter, Ekaterina Yurchuk, K. Khullar, Johannes Müller, Patrick Polakowski, E. D. Grimley, J. M. LeBeau, Stefan Flachowsky, S. Jansen, Sabine Kolodinski, Ralf Van Bentum, Alfred Kersch, Christopher Künneth, Thomas Mikolajick

Proceedings of the 46th European Solid-State Device Research Conference, 2016

2014

ALD ZrO2 processes for BEoL device applications.

Wenke Weinreich, Konrad Seidel, Patrick Polakowski, Stefan Riedel, Lutz Wilde, Dina H. Triyoso, Mark G. Nolan

Proceedings of the 2014 IEEE International Conference on IC Design & Technology, 2014

ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM.

D. H. Triyoso, Wenke Weinreich, Konrad Seidel, Mark G. Nolan, Patrick Polakowski, D. Utess, Susanne Ohsiek, K. Dittmar, M. Weisheit, M. Licbau, R. Fox

Proceedings of the 2014 IEEE International Conference on IC Design & Technology, 2014