Mireille Maenhoudt

According to our database, Mireille Maenhoudt authored at least 3 papers between 2008 and 2011.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2011

In-line metrology and inspection for process control during 3D stacking of IC's.

Sandip Halder, Ingrid De Wolf, Alain Phommahaxay, Andy Miller, Mireille Maenhoudt, Gerald Beyer, Bart Swinnen, Eric Beyne

Proceedings of the 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31, 2011

2009

Lithography Options for the 32 nm Half Pitch Node and Beyond.

Kurt Ronse, Philippe Jansen, Roel Gronheid, Eric Hendrickx, Mireille Maenhoudt, Vincent Wiaux, Mieke Goethals, R. Jonckheere, Geert Vandenberghe

IEEE Trans. Circuits Syst. I Regul. Pap., 2009

2008

Lithography options for the 32nm half pitch node and beyond.

Kurt Ronse, Philippe Jansen, Roel Gronheid, Eric Hendrickx, Mireille Maenhoudt, Mieke Goethals, Geert Vandenberghe

Proceedings of the IEEE 2008 Custom Integrated Circuits Conference, 2008