Miko Elwenspoek
According to our database1,
Miko Elwenspoek
authored at least 5 papers
between 2008 and 2013.
Collaborative distances:
Collaborative distances:
Timeline
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Bibliography
2013
2011
Dimensional control in corner lithography for wafer-scale fabrication of nano-apertures.
Proceedings of the 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011
2010
<i>Micromachines </i>- An Open Access Journal on Microelectromechanical Systems (MEMS).
Micromachines, 2010
2008