Michio Uneda

According to our database, Michio Uneda authored at least 5 papers between 2014 and 2022.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2022

Polishing Characteristics and Mechanism of Polishing Glass Substrate Using Suede Pad with Fine Micrometer-Sized Pores.

Michio Uneda, Nodoka Yamada, Yoshihiro Tawara

Int. J. Autom. Technol., 2022

2021

Flexible Fiber Conditioner for Fine Conditioning of Polishing Pad and its Evaluation in Chemical Mechanical Polishing: Verification of SUS-FFC on Soft Urethane Foam Pad and Proposal of PEEK-FFC.

Michio Uneda, Naoki Takahashi, Takashi Fujita, Yutaro Arai

Int. J. Autom. Technol., 2021

2018

Patterned Sapphire Substrates for III-Nitride Epitaxial Growth.

Natsuko Omiya, Hideo Aida, Yutaka Kimura, Yuki Kawamata, Seong-Woo Kim, Michio Uneda

Int. J. Autom. Technol., 2018

2015

Investigation into Chemical Mechanical Polishing Mechanism of Hard-to-Process Materials Using a Commercially Available Single-Sided Polisher.

Michio Uneda, Keiichi Takano, Koji Koyama, Hideo Aida, Ken-Ichi Ishikawa

Int. J. Autom. Technol., 2015

2014

Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate.

Koji Koyama, Hideo Aida, Michio Uneda, Hidetoshi Takeda, Seong-Woo Kim, Hiroki Takei, Tsutomu Yamazaki, Toshiro Doi

Int. J. Autom. Technol., 2014