Matthias Mohaupt
According to our database1,
Matthias Mohaupt
authored at least 2 papers
between 2010 and 2012.
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Bibliography
2012
Precisely Assembled Multi Deflection Arrays - Key Components for Multi Shaped Beam Lithography.
Proceedings of the Precision Assembly Technologies and Systems, 2012
2010
Proceedings of the Precision Assembly Technologies and Systems, 2010