Matthias Koitzsch

According to our database, Matthias Koitzsch authored at least 2 papers in 2011.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2011

A virtual equipment as a test bench for evaluating virtual metrology algorithms.

Andreas Mattes, Matthias Koitzsch, Dirk Lewke, Michael Müller-Zell, Martin Schellenberger

Proceedings of the Winter Simulation Conference 2011, 2011

Implementing virtual metrology into semiconductor production processes: an investment assessment.

Matthias Koitzsch, Humbert Noll, Alexander Nemecek, Jochen Merhof, Markus Michl, Alfred Honold, Gerhard Kleineidam, Holger Lebrecht

Proceedings of the Winter Simulation Conference 2011, 2011