Matthias Beichele

According to our database, Matthias Beichele authored at least 2 papers in 2001.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2001

Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode in PMOS devices.

S. Strobel, Anton J. Bauer, Matthias Beichele, Heiner Ryssel

Microelectron. Reliab., 2001

Reliability of ultrathin nitrided oxides grown in low pressure N₂O ambient.

Matthias Beichele, Anton J. Bauer, Heiner Ryssel

Microelectron. Reliab., 2001