Martin Schellenberger

According to our database, Martin Schellenberger authored at least 6 papers between 2011 and 2021.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of four.

2021

Fully convolutional networks for chip-wise defect detection employing photoluminescence images.

Maike Lorena Stern, Martin Schellenberger

J. Intell. Manuf., 2021

Smart Platform for Rapid Prototyping: Solutions in the Dilemma of Flexibility and Standardization.

Sabrina Anger, Felix Klingert, Volker Häublein, Markus Pfeffer, Martin Schellenberger

Proceedings of the 22nd IEEE International Conference on Industrial Technology, 2021

2016

Direct optical stress sensing in semiconductor manufacturing using Raman micro-spectrometry.

Martin De Biasio, Martin Kraft, Michael Roesner, Christoph Bergmann, Maria Mercedes Cerezuela-Barreto, Dirk Lewke, Martin Schellenberger

Proceedings of the 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016, 2016

2014

The Factory Integration Roadmap in Semiconductor manufacturing.

James R. Moyne, Martin Schellenberger, Lothar Pfitzner

Proceedings of the 44th European Solid State Device Research Conference, 2014

2012

Virtual equipment for benchmarking predictive maintenance algorithms.

Andreas Mattes, Ulrich Schöpka, Martin Schellenberger, Peter Scheibelhofer, Günter Leditzky

Proceedings of the Winter Simulation Conference, 2012

2011

A virtual equipment as a test bench for evaluating virtual metrology algorithms.

Andreas Mattes, Matthias Koitzsch, Dirk Lewke, Michael Müller-Zell, Martin Schellenberger

Proceedings of the Winter Simulation Conference 2011, 2011