Martin Lemberger
According to our database1,
Martin Lemberger
authored at least 6 papers
between 2001 and 2007.
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Bibliography
2007
Polarity asymmetry of stress and charge trapping behavior of thin Hf- and Zr-silicate layers.
Microelectron. Reliab., 2007
Chemical vapor deposition of tantalum nitride films for metal gate application using TBTDET and novel single-source MOCVD precursors.
Microelectron. Reliab., 2007
2005
Conduction mechanisms and an evidence for phonon-assisted conduction process in thin high-k Hf<sub>x</sub>Ti<sub>y</sub>Si<sub>z</sub>O films.
Microelectron. Reliab., 2005
Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor.
Microelectron. Reliab., 2005
2003
Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors.
Microelectron. Reliab., 2003
2001
Electrical reliability aspects of through the gate implanted MOS structures with thin oxides.
Microelectron. Reliab., 2001