Martin Bednarzik
According to our database1,
Martin Bednarzik
authored at least 2 papers
in 2003.
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Bibliography
2003
Fabrication of Ultra Thick, Ultra High Aspect Ratio Microcomponents by Deep and Ultra Deep X-Ray Lithography.
Proceedings of the 2003 International Conference on MEMS, 2003
First Results in Patterning of Ultra High Aspect Ratio Microstructures by a 4T Wave Length Shifter at BESSY.
Proceedings of the 2003 International Conference on MEMS, 2003