Mark Carruthers

According to our database, Mark Carruthers authored at least 1 paper in 2011.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2011

Plasma etch and dielectric deposition processes for TSV Reveal.

Keith Buchanan, Dave Thomas, Hefin Griffiths, Kathrine Crook, Daniel Archard, Mark Carruthers, Masahiko Tanaka

Proceedings of the 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31, 2011