Maju Tomura

According to our database, Maju Tomura authored at least 1 paper in 2023.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2023

Beyond 10 μm Depth Ultra-High Speed Etch Process with 84% Lower Carbon Footprint for Memory Channel Hole of 3D NAND Flash over 400 Layers.

Yoshihide Kihara, Maju Tomura, Wataru Sakamoto, Masanobu Honda, Masayuki Kojima

Proceedings of the 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), 2023