M. Zen

According to our database, M. Zen authored at least 2 papers between 2006 and 2011.

Collaborative distances:

• Dijkstra number of four.
• Erdős number of five.

2011

Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH.

Ravindra Mukhiya, Alvise Bagolini, T. K. Bhattacharyya, Leandro Lorenzelli, M. Zen

Microelectron. J., 2011

2006

Stress and resistivity analysis of electrodeposited gold films for MEMS application.

Subhadeep Kal, A. Bagolini, Benno Margesin, M. Zen

Microelectron. J., 2006