M. S. Giridhar
According to our database1,
M. S. Giridhar
authored at least 2 papers
between 2017 and 2021.
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Bibliography
2021
Process Development for Very Deep Etching of Silicon Using Two Layer Masks for Fabrication of Mechanically Decoupled MEMS Gyroscope.
Proceedings of the 25th International Symposium on VLSI Design and Test, 2021
2017