Lukas Gerlich

According to our database, Lukas Gerlich authored at least 1 paper in 2020.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2020

BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms.

Betting Wehring, Raik Hoffmann, Lukas Gerlich, Malte Czernohorsky, Benjamin Uhlig, Robert Seidel, Tobias Barchewitz, Frank Schlaphof, Lutz Meinshausen, Christoph Leyens

Proceedings of the 2020 IEEE International Reliability Physics Symposium, 2020