Luís da Silva Zambom

Orcid: 0000-0001-5291-2149

According to our database1, Luís da Silva Zambom authored at least 2 papers between 2003 and 2009.

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Bibliography

2009
Low-temperature deposition of silicon oxide and silicon nitride by reactive magnetron sputtering.
Microelectron. J., 2009

2003
High density plasma chemical vapor deposition of diamond-like carbon films.
Microelectron. J., 2003


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