Kurt E. Petersen

According to our database¹, Kurt E. Petersen authored at least 2 papers between 1980 and 1998.

Collaborative distances:

Awards

IEEE Fellow 1996, "For pioneering contributions and successful commercialization of micromechanical systems.".

Book

In proceedings

Article

PhD thesis

Dataset

Other

1998

Bulk micromachining of silicon.

[BibT_eX]

[DOI]

Proc. IEEE, 1998

1980

Silicon Torsional Scanning Mirror.

[BibT_eX]

[DOI]

IBM J. Res. Dev., 1980