Klaus Hempel

According to our database, Klaus Hempel authored at least 3 papers between 2012 and 2019.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2019

22FDX^® fMAX Optimization through Parasitics Reduction and GM Boost.

Zhixing Zhao, Patrick James Artz, Klaus Hempel, Juergen Faul, Tianbing Chen, Richard Taylor, Jerome Mazurier, Carsten Grass, Jan Hoentschel, David Harame, Steffen Lehmann, Luca Lucci, Yogadissen Andee, Alexis Divay, Luca Pirro, Tom Herrmann, Alban Zaka, Ricardo Sousa

Proceedings of the 49th European Solid-State Device Research Conference, 2019

2013

Impact of precursors choice on characteristics of PEALD SiN for spacer applications.

Dina H. Triyoso, Klaus Hempel, Susanne Ohsiek, Jeff Shu, Jamie K. Schaeffer, Markus Lenski

Proceedings of 2013 International Conference on IC Design & Technology, 2013

2012

Robust PEALD SiN spacer for gate first high-k metal gate integration.

D. H. Triyoso, V. Jaschke, Jeff Shu, S. Mutas, Klaus Hempel, Jamie K. Schaeffer, Markus Lenski

Proceedings of the IEEE International Conference on IC Design & Technology, 2012