Kensaku Kanomata
According to our database1,
Kensaku Kanomata
authored at least 7 papers
between 2013 and 2022.
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Bibliography
2022
Low-Temperature Deposition of Yttrium Oxide on Flexible PET Films Using Time-Separated Yttrium Precursor and Oxidizer Injections.
IEICE Trans. Electron., October, 2022
Low-Temperature Atomic Layer Deposition of AlN Using Trimethyl Aluminum and Plasma Excited Ar Diluted Ammonia.
IEICE Trans. Electron., October, 2022
2018
Room-Temperature Atomic Layer Deposition of SnO<sub>2</sub> Using Tetramethyltin and Its Application to TFT Fabrication.
IEICE Trans. Electron., 2018
2015
IEICE Trans. Electron., 2015
Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy.
IEICE Trans. Electron., 2015
2013
Fabrication of β-FeSi<sub>2</sub> Films on Si(111) Using Solid-Phase Growth Reaction from Fe and FeSi Sources.
IEICE Trans. Electron., 2013
IEICE Trans. Electron., 2013