Katja Meinel
Orcid: 0000-0002-5387-8314
According to our database1,
Katja Meinel
authored at least 3 papers
between 2018 and 2020.
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Bibliography
2020
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.
Sensors, 2020
2019
Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride.
Proceedings of the 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019, 2019
2018
Thin Film Piezoelectric Aluminum Nitride for Piezoelectric Micromachined Ultrasonic Transducers.
Proceedings of the 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018, 2018