Karla Hiller

According to our database, Karla Hiller authored at least 6 papers between 2003 and 2022.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2022

Defect-controlled Resistance Degradation of Sputtered Lead Zirconate Titanate Thin Films.

Kuan-Ting Ho, Daniel Monteiro Diniz Reis, Karla Hiller

Proceedings of the IEEE International Reliability Physics Symposium, 2022

2020

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.

Katja Meinel, Marcel Melzer, Chris Stoeckel, Alexey Shaporin, Roman Forke, Sven Zimmermann, Karla Hiller, Thomas Otto, Harald Kuhn

Sensors, 2020

2019

Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform.

Zhi Li, Sai Gao, Uwe Brand, Karla Hiller, Susann Hahn, Gerry Hamdana, Erwin Peiner, Helmut Wolff, Detlef Bergmann

Sensors, 2019

Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride.

Katja Meinel, Chris Stoeckel, Marcel Melzer, Sven Zimmermann, Roman Forke, Karla Hiller, Thomas Otto

Proceedings of the 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019, 2019

2018

Reliability testing of integrated low-temperature PVD PZT films.

Daniel Monteiro Diniz Reis, Sven Rzepka, Karla Hiller

Microelectron. Reliab., 2018

2003

Advanced Silicon Micromachining.

Thomas Gessner, Andreas Bertz, Christian Lohmann, Steffen Kurth, Karla Hiller

Int. J. Comput. Eng. Sci., 2003